File:20 nm width stochastic failure probability.png
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Summary
| Description |
English: The probability of stochastic failure is plotted vs. pitch for 20 nm space widths at an EUV dose of ~30 mJ/cm2.[1] Points below 0.5 ppm are extrapolated. When the distance between exposed 20 nm spaces exceeds about 25-30 nm, the failure probability starts to increase. There is a contribution from secondary electron straggling in the ~20 nm range.[2] |
| Date | |
| Source | Excel |
| Author | Guiding light |
Licensing
Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licences:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation Licence, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the licence is included in the section entitled GNU Free Documentation Licence. |
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Original upload log
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2018-10-21 00:57:28 | 481 × 288 | Guiding light | |
| 2018-10-20 16:14:10 | 481 × 288 | Guiding light | |
| 2018-10-20 15:32:55 | 481 × 287 | Guiding light | |
| 2018-10-20 13:36:11 | 481 × 288 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
References
- ↑ P. De Bisschop and E. Hendrickx, Proc. SPIE 10583, 105831K (2018).
- ↑ A. N. Broers, IEEE Trans. Elec. Dev. 28, 1268 (1981).
File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 23:19, 23 February 2019 | | 480 × 288 (10 KB) | wikimediacommons>Guiding light | x-axis range |
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