File:Defocus of subresolution assist features.png

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Defocus_of_subresolution_assist_features.png ‎(654 × 288 pixels, file size: 19 KB, MIME type: image/png)

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Summary

Description
English: Subresolution assist features suffer from printability due to defocus at the larger pitch.[1][2][3][4][5][6]
Date
Source Excel
Author Guiding light

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I, the copyright holder of this work, hereby publish it under the following licences:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation Licence, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the licence is included in the section entitled GNU Free Documentation Licence.
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  • attribution – You must give appropriate credit, provide a link to the licence, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
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References

  1. ↑ L. S. Melvin III et al., Proc. SPIE 6281, 62810X (2006).
  2. ↑ B. W. Smith, Proc. SPIE 4346, 471 (2001).
  3. ↑ Z. M. Ma and A. Andersson, Proc. SPIE 3334, 543 (1998).
  4. ↑ W. Shim et al., Proc. SPIE 6730, 67302P (2007).
  5. ↑ G. Vandenberghe et al., Proc. SPIE 4346, 179 (2001).
  6. ↑ M. Burkhardt and A. Raghunathan, Proc. SPIE 9422, 94220X (2015).

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28 April 2019

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