File:LELE challenge.png

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LELE_challenge.png(472 × 353 pixels, file size: 5 KB, MIME type: image/png)

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Summary

Description The challenge of litho-etch patterning is the combination of overlay error and CD control from successive exposures.
Date
Source PowerPoint drawing
Author Guiding light

Licensing

Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licences:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation Licence, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the licence is included in the section entitled GNU Free Documentation Licence.
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Original upload log

The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2018-08-03 13:01:42 472 × 353 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

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3 August 2018

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Date/TimeThumbnailDimensionsUserComment
current21:29, 2 April 2020Thumbnail for version as of 21:29, 2 April 2020472 × 353 (5 KB)wikimediacommons>Hippymoose17Transferred from en.wikipedia (MTC!) (1.1.0)

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