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DescriptionMEMsfounding.jpg
English: Proposal submitted to DARPA in 1986 first introducing the term "microelectromechanical systems"
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A proposal by Stephen Jacobsen
Author
Stephen Jacobsen
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{{Information |Description={{en|1=Proposal submitted to DARPA in 1986 first introducing the term "microelectromechanical systems"}} |Source=A proposal by Stephen Jacobsen |Author=Stephen Jacobsen |Date=1986-07-15 |Permission= |other_versions= }} [[Catego